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采用氮辉光放电等离子体快电子和各种重粒子（N＋２，N＋，Nf）的混合Monte Carlo模型，从不同放电条件的离解碰撞率，快原子态粒子（N+，Nf）在阴极鞘层区的输运过程及轰击阴极的能量及角分布三个方面研究了 N＋２+N２→N+＋N+N2f反应在氮气直流辉光放电中的作用.该过程在电压较高时为阴极鞘层区的重要离解过程， 且主要发生在阴极附近，其碰撞率随电压和气压增加而增加；阴极表面附近的活性粒子（N＋，Nf）主要由该离解过程产生（而不是e--N2离解电离过程），而且这些粒子具有中等的平均能量且小角入射，是
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关键词:
- 氮直流辉光放电 /
- Monte Carlo模拟 /
- N＋２-N２碰撞离解
A model is developed for a nitrogen direct-current glow discharge by a combination of Monte Carlo model of fast electrons and various heavy particles(N＋２，N＋，Nf),in which N+2-N２ dissociative charge transfer is incorporated,and the role of this process in nitrogen glow discharge is investigated .It is found that this process is dominant in the space of close to the cathode,and that this becomes important with increasing voltage,especially that this plays an important role at higher voltages for the production of fast atomic species(N＋，Nf) at the cathode.We have also compared our calculated results with experimental data.
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中国物理学会期刊
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