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中国物理学会期刊

超短脉冲激光照射下氧化铝的烧蚀机理

CSTR: 32037.14.aps.53.2154

The mechanism of ablation of sapphire by an ultra-short pulse laser

CSTR: 32037.14.aps.53.2154
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  • 利用烧蚀面积与激光脉冲能量的线性关系,确定了氧化铝的破坏阈值,同时采用散射光探测法,研究了800和400nm超短脉冲激光作用下氧化铝的破坏阈值对激光脉宽的依赖关系,并探讨了氧化铝的烧蚀规律. 利用雪崩击穿模型,解释了实验结果,并讨论了导带电子光吸收机理.

     

    Based on the linear dependence of laser pulse energy on the ablation area, the ablation threshold fluence of sapphire is calculated in this paper. Meanwhile the threshold fluence of sapphire as a function of pulse duration is studied with an ultra-short pulse laser. The experimental results agree well with the theory of avalanche mode. Finally we discussed the photon absorption mechanism of the conduction band electrons in Al2O3.

     

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