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中国物理学会期刊

飞秒激光烧蚀石英玻璃的实验与理论研究

CSTR: 32037.14.aps.53.2216

Experimental and theoretical study on the ablation of fused silica by femtosecond lasers

CSTR: 32037.14.aps.53.2216
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  • 实验研究了800nm飞秒激光作用下石英玻璃的破坏机理和烧蚀规律,给出了破坏阈值与脉冲宽度的关系.发展了雪崩击穿模型,计算了材料的烧蚀阈值与脉冲宽度的依赖关系,烧蚀深度、烧蚀体积与脉冲能量的依赖关系,研究了导带电子的扩散对材料中激光能量的沉积、分布,以及材料的破坏阈值和烧蚀规律的影响.

     

    In this paper we report the measurements of the damage threshold and ablation depth for fused silica by laser pulses at the wavelength of 800 nm, with the pulse duration ranging from 45 to 800fs. These results can be well understood by using an improved avalanche model. The model includes the production of conduction band electrons(CBE), laser energy deposition, and CBE diffusion. The evolution of micro-explosion is investigated based on this model.

     

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