A new method to fabricate vertically aligned films for liquid crystals was proposed and studied experimentally. Photosensitive monomers of hexafluorobiphenol A dicinnamic esters were crosslinked by exposure under ultraviolet light. The obtained films could induce vertical alignment of liquid crystals. The process of the film making was very simple and did not need annealing at high temperatures. UV-visible spectra and polarized FT-IR spectra revealed that the photo-crosslinking reaction happened and reaction degree was rather high after the exposure under ultraviolet light. The stability of the aligned film could be kept to 120℃.