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中国物理学会期刊

硅基两维光子晶体的制备和光子带隙特性

CSTR: 32037.14.aps.53.3583

Fabrication and photonic band gap property of the two-dimensional square lattice based on silicon

CSTR: 32037.14.aps.53.3583
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  • 利用反应离子束刻蚀设备制备了硅基的两维空气柱光子晶体,并用红外显微镜测试了样品的 反射谱. 理论上用时域有限差分(FDTD)方法计算了样品的光子带隙,从测试结果看光子带隙 和理论计算的光子带隙符合得很好. 

     

    Two_dimensional air_cylinder photonic crystals were fabricated based on silicon by using the multiplex inductively coupled plasma system supplied by STS company . Photonic band gap was theoretically calculated by using the finite different t ime domain (FDTD) method, and the reflection spectrum was measured experimentall y using the microscope infrared spectrometer instrument. We find that the reflec tion measurements are in good agreement with the theoretically expected behaviour.

     

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