-
The number of metastable state densities obtained ranges from 1×1015to 4×1015 m-3 in the electron cyclotron resonance (ECR) argon plasma by measuring the optical absorption of the 8115 nm spectral line under the conditions of 02—08 Pa and 500—800 W. Taking into account the c ontribution of both the ground state and the 1s5 metastable state to the emiss ions, the electron temperature Te is measured by the ratio of emissio n lines. Results show that there are obvious differences compared with only considering t he metastable state densities.
-
Keywords:
- optical emission spectroscopy /
- metastable state densities /
- electron temperature /
- ECR plasma







下载: