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中国物理学会期刊

电子回旋共振氩等离子体中亚稳态粒子数密度及电子温度的测量

CSTR: 32037.14.aps.54.2153

Measurement of metastable state densities and electron temperatures in an electron cyclotron resonance argon plasma

CSTR: 32037.14.aps.54.2153
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  • 测量了电子回旋共振(ECR)氩等离子体中Ar的1s5亚稳态粒子数密度,在气压 为02—0 8 Pa、功率为500—700W的范围内,利用吸收光谱法测量了Ar原子8115 nm谱线的吸收强 度,得到1s5亚稳态粒子数密度为1×1015—4×1015 m -3.本文综合考 虑基态和1s5亚稳态粒子的激发对Ar发射谱线强度的贡献后,用两条发射谱线强 度之比得 到电子温度.结果表明,计入了1s5亚稳态激发的贡献后,所得到的电子温度与 只考虑基态的贡献得到的电子温度相比存在较大的差别.

     

    The number of metastable state densities obtained ranges from 1×1015to 4×1015 m-3 in the electron cyclotron resonance (ECR) argon plasma by measuring the optical absorption of the 8115 nm spectral line under the conditions of 02—08 Pa and 500—800 W. Taking into account the c ontribution of both the ground state and the 1s5 metastable state to the emiss ions, the electron temperature Te is measured by the ratio of emissio n lines. Results show that there are obvious differences compared with only considering t he metastable state densities.

     

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