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中国物理学会期刊

改进的DLA方法模拟薄膜二维生长

CSTR: 32037.14.aps.54.2212

Simulation of two-dimensional thin film growth by modified DLA method

CSTR: 32037.14.aps.54.2212
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  • 对经典的DLA模型进行改进,研究了薄膜的二维生长过程.通过改变表征吸附原子在基底扩散 能力的参量DT,DC以及表征沉积速率的参量DV,得到 了与实验一致的薄 膜分形生长模式和团状生长模式.分析了薄膜的形核阶段原子团的大小分布,以及不同条件 下原子团的数目和大小随覆盖度的变化.

     

    The two_dimensional thin film growth is simulated by modified diffusion_Limited_ aggregation method. The thin film morphologies such as fractal growth and dense growth are obtained by changing the parameters DT,DC an d DV. The number and the size of clusters changing with coverage are analyzed. The re sults are consistent with the experimental results.

     

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