The depth distribution of 200keV Vanadium ions implanted into the dry peanut seeds have been determined by SEM+EDAX, PIXE, TPLSM and PAT. The results of measurements show that the depth of ion with low energy implanted into the dry peanut seeds are much greater than the value of depth calculated by of TRIM95 program. The mechanism of biological effect of ion with low energy implanted to the plant seed was discussed.