搜索

x
中国物理学会期刊

Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管制备及存储特性

CSTR: 32037.14.aps.55.1512

Memory characteristics of metal-ferroelectric-semiconductor field-effect-transistors with Ag/Bi4Ti3O12/p-Si gate

CSTR: 32037.14.aps.55.1512
PDF
导出引用
  • 在溶胶-凝胶工艺获得高质量Bi4Ti3O12薄膜的基础上 ,制备了Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管. 研 究了Si基Bi4Ti3O12薄膜的生长特性及其对铁电薄膜/ 硅的界面状态和铁电场效应晶体管存储特性的影响. 研究表明,在合理的工艺条件下可以获 得具有较高c-轴择优取向的纯钙钛矿相Si基Bi4Ti3O12 铁电薄膜并有利于改善Bi4Ti3O12/Si之间的界面特性; 顺时针回滞的C-V特性曲线和C-T曲线表明Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管具有极化存储效应和一定的极化电荷保持能力; 器件的转移(Isd-VG)特性曲线显示Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管具有明显的栅极化调制效应.

     

    Metal-ferroelectric-semiconductor field-effect-transistors (FFETs) with Ag/Bi4Ti3O12/p-Si gate were fabricated using the high q uality Bi4Ti3O12 on p-Si substrates prepared by Sol-Gel technique. The phase structure characteristics of Bi4Ti 3O12 films, the interface characteristics of ferroelectric/Si a nd the memory characteristics of the FFETs were investigated. Bi4Ti 3O12 films with high preferred c-axis-orientation are obta ined at appropriate annealing temperature which helps to improve the interface c haracteristics of ferroelectric/Si. The C-V hysteresis curves with clockwise loo ps prove that the FFETs could realize a memory effect due to the ferroelectric p olarization of Bi4Ti3O12 films, and the capacit ance decay of 11% in 16 hours indicates that the FFETs have good polarization ch arge retention. The counter-clockwise Ids-VG hysterisis cu rve of the FFETs demonstrates that the channel current is modulated by the ferro electric polarization of Bi4Ti3O12 films.

     

    目录

    /

    返回文章
    返回