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中国物理学会期刊

低能氩离子束对多孔铝阳极氧化膜表面的刻蚀效应研究

CSTR: 32037.14.aps.55.1517

Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes

CSTR: 32037.14.aps.55.1517
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  • 用低能氩离子束(Ar+)处理了多孔铝阳极氧化膜(AAO)表面.扫描电子显微镜和原 子力显微镜结果表明,Ar+束刻蚀不仅可以有效地去除AAO反面阻挡层,还可使A AO表面产生多种特殊的形貌,如采用倾角入射可使其表面产生波纹,倾角入射同时旋转样品 台,可实现表面抛光.并结合Bradley和Harper提出的无定形材料表面波纹的形成和演化理论 解释了AAO表面波纹的特征.

     

    Porous anodic aluminum oxide (AAO) membranes were sputtered by 500eV argon ion ( Ar+) beam. Scanning electron microscopy and atomic force microscopy i mages show that not only the barrier layer of AAO can be easily removed by Ar+ beam sputtering, but also several categories of surface morphologies w ere got by changing the incidence parameters. For instance, off-normal incidence bombardment results in ripple formation on the surface of AAO and off-normal in cidence during smple stage rotation leads to AAO surface smoothing. Theory of ri pple formation and evolution on amorphous substrate under ion beam irradiation d eveloped by Bradley and Harper is used to interpret the characteristics of rippl es on AAO surface.

     

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