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中国物理学会期刊

金刚石膜探测器研制

CSTR: 32037.14.aps.55.2170

Preparation of diamond-film based radiation detector

CSTR: 32037.14.aps.55.2170
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  • 采用直流电弧等离子喷射(DC arc plasma jet)CVD(chemical vapour deposition)工艺制成的金刚石薄膜,研制成功MSM(metal-semiconductor-metal)型CVD金刚石脉冲辐射探测器.对制作的金刚石薄膜材料及探测器有关性能进行了测量,结果表明,采用Raman shift-1的金刚石薄膜制成的探测器,可满足亚纳秒脉冲辐射探测的要求.由于其独特的物理性能,在制作成本合理的情况下,在脉冲辐射测量中可取代Si-PIN探测器.

     

    Detector grade diamond films have been prepared by DC Arc Plasma Jet chemical vapour deposition from CH4-H2 mixtures.Diamond detectors of pulsed radiation based on the films have been developed and preliminarily studied.The responses of the detector to 1.25MeV γ ray and pulsed ultraviolet laser with picosecond width show that this detector has a very fast time-response and about 70% charge collection efficiency.Its further applications will be found in sub-nanosecond pulse measurements.

     

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