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中国物理学会期刊

磁控溅射方法制备垂直取向FePt/BN颗粒膜

CSTR: 32037.14.aps.55.2562

The preparation of FePt/BN particle films with perpendicular texture by magnetron sputtering

CSTR: 32037.14.aps.55.2562
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  • 用磁控溅射在热单晶MgO(100)基片上制备了[FePt/BN]多层膜,经真空热处理后,得到具有垂直取向L10-FePt/BN颗粒膜.X射线衍射结果和磁性测量的结果表明,[FePt(2nm)/BN(0.5nm)]10和[FePt(1nm)/BN(0.25nm)]20多层膜经700℃热处理1h后,均具有较好的(001)取向.[FePt(1nm)/BN(0.25nm)]20垂直矫顽力达到522kA/m,剩磁比达到0.99,开关场分布S达到0.94,FePt晶粒平均尺寸约15—20nm,适合用于将来超高密度的垂直磁记录介质.

     

    [FePt/BN]n multilayers were prepared on MgO (100) single crystal substrates at 250℃ with magnetron sputtering. The perpendicular texture of L10-FePt/BN particle films was formed after vacuum annealing. The results of X-ray diffraction and magnetic tests show that the [FePt(2nm)/BN(0.5nm)]10 and [FePt(1nm)/BN(0.25nm)]20 multilayers have excellent (001) texture when the films were sputtered on substrates at 250℃ after annealed at 700℃ for 1h. The mean size of L10-FePt particles is roughly 15—20nm and its perpendicular coercive force reaches 522 kA/m. Moreover, the Mr/Ms and switching filed distribution S* reach 0.99 and 0.94, respectively. This particle film is a candidate for future perpendicular magnetic recording media with ultrahigh density.

     

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