(FexPt1-x)100-yCuy(x=0.46—0.56,y=0,0.04,0.12) thin films with a fixed thickness of 50nm have been prepared by magnetron sputtering. The atomic ratio of Fe to Pt atoms was accurately controlled by DC co-sputtering. The ordering parameter of the L10 phase is not enhanced for the films with x>0.52. On the contrary, the ordering process is improved by the addition of Cu for the Pt-rich or stoichiometric thin films. In order to get the ordering of FePt films at a low annealing temperature, the lower the Fe content, the more addition of Cu is needed. It is found that the L10 phase can be obtained after annealing at 350℃ for 20 min only for films with the ratio of the (FeCu)/Pt in the range of 1.1—1.2.