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中国物理学会期刊

SiO2脊形条波导热极化引起的电光效应

CSTR: 32037.14.aps.55.5283

Electro-optic effect induced by thermal poling in SiO2 ridge waveguides

CSTR: 32037.14.aps.55.5283
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  • 通过理论模拟对具有上覆盖层的SiO2脊形条波导结构进行了优化,在此基础上利用微电子工艺制作了SiO2脊形波导Mach-Zehnder型电光调制器,并进行热极化引起的电光和非线性效应的研究.热极化过程大幅增强了样品的电光及非线性效应,二次电光系数由热极化前的1.56×10-22(m/V)2提高到热极化后的8.50×10-22(m/V)2,极化后得到了0.093pm/V的线性电光系数,对热极化的物理机理进行了理论分析.

     

    The structure of silica ridge waveguides with upper-cladding is optimized by theoretical simulation. Based on this design, a Mach-Zehnder electro-optic modulator is fabricated by micro-electronics techniques, which is used for the study of electro-optic effect and nonlinear effect induced by thermal poling. The nonlinear effects in silica are improved after thermal poling, with 0.093pm/V and 8.50×10-22(m/V)2 achieved in the experiment for linear electro-optic coefficient and second-order electro-optic coefficient,respectively. The physical mechanism of the enhancement of nonlinear effects in silica by thermal poling is also analyzed theoretically.

     

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