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中国物理学会期刊

高击穿电压的AlGaN/GaN FP-HEMT研究与分析

CSTR: 32037.14.aps.56.2895

Study of high breakdown-voltage AlGaN/GaN FP-HEMT

CSTR: 32037.14.aps.56.2895
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  • 就蓝宝石衬底上制备的AlGaN/GaN场板(field plate)HEMT器件、常规HEMT器件性能进行了分析对比.结果证明两种结构的器件直流参数变化不大,但是采用场板后器件的击穿电压从52V提高到了142V.在此基础上利用Sivaco软件对两种器件进行模拟仿真,深入分析了FP对器件击穿电压的影响.

     

    Fabrication and the characteristics at room temperature of FP-HEMT are reported, followed by a comparison of the actual characteristics with the conventional HEMT. With the incorporation of field plate, the breakdown voltage was enhanced from 52 to 142V.Comparison between AlGaN/GaN FP-HEMT and the conventional HEMT are also made, using Silvaco, as the simulation tool. The effect of enhancing the breakdown voltage is also investigated.

     

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