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中国物理学会期刊

镓铝双质掺杂在制造快速晶闸管中的应用研究

CSTR: 32037.14.aps.56.4823

Research of the Ga and Al double-impurity doping technique for making fast switching thyristor

CSTR: 32037.14.aps.56.4823
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  • 采用开管式Al乳胶源涂布与气相Ga相结合的技术,实现了镓铝双质在n型Si中的均匀掺杂,得到了p型半导体.研究了镓铝双质掺杂的方法及其与器件性能的关系,并讨论了机理.利用扩展电阻法、四探针和晶闸管测试仪等手段,测试了镓铝扩散Si片的杂质分布规律、薄层电阻RS及快速晶闸管的多项参数.利用该技术制造的快速晶闸管的关断时间toff为31.2—38.6 μs,开通时间ton为4.6—5.9 μs,通态峰值压降

     

    We describe a novel technique for producing the p-type semiconductor. The homogeneous impurity doping of Ga and Al in the n-type silicon wafer is achieved by means of the combination of two technical processes namely aluminum emulsion coating and vaporizing Ga. This Ga-Al double-impurity doping technique, as well as its effect on the quality of the produced semiconductor devices, is investigated theoretically and tested in practice. The principle of the doping technique is also discussed in detail. By using SRP, four-probe needle and thyristor analyzer, we have examined the Ga-Al impurity concentration distribution within the silicon wafer, thin layer resistance RS, and other useful parameters of the fast switching thyristors made by this technique. The turn-off time of the fast switching thyristors, toff is 31.2—38.6 μs, turn-on time ton is 4.6—5.9 μs, and the forward voltage drop VTM measured is 1.9—2.1 V. Both experiment and some real applications indicated that this technique may obviously improve the semiconductor device in the overall performance, the electrical parameter uniformity and the end product rate. It provides a feasible technique for making fast switching thyristors.

     

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