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中国物理学会期刊

场致发射阴极碳纳米管的热化学气相沉积法低温生长

CSTR: 32037.14.aps.56.6705

Low temperature growth of carbon nanotubes by chemical vapor deposition for field emission cathodes

CSTR: 32037.14.aps.56.6705
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  • 结合丝网印刷和过滤阴极真空电弧法、离子束溅射方法,在普通玻璃衬底上制备催化剂图案,采用低温热化学气相沉积法(CVD)生长碳纳米管/纤维(CNTs)薄膜.研究了不同种类催化剂对CNTs薄膜生长及其场发射的影响.结果表明,在a-C:Co,Ni-Cu和Cu三种催化剂上没有获得明显的CNTs,在外加电场小于4.4V/μm时没有观察到场发射;而在Ni-Fe及Ni-Cr两种催化剂上获得了大量的CNTs,并且表现出良好的场发射性能,开启电场为2.5V/μm,这种热CVD有简单、低温等优点,在CNTs场发射显示器的阴极制备中有潜在的应用价值.

     

    Carbon nanotubes/nanofibers (CNTs) were grown on sodalime glass by low temperature chemical vapor deposition. The catalytic films were pre-patterned using screen-printing method, combined with filtered cathodic vacuum arc or ion beam sputtering. The effect of different catalysts on the CNT growth and field emission were investigated. For samples catalyzed with a-C:Co, Ni-Cu or Cu, no CNTs are formed, and they show no field emission below the applied field of 4.4V/μm. For samples catalyzed with Ni-Fe or Ni-Cr, large amounts of entangled CNTs are successfully obtained and exhibit good electron emission, having a turn-on field as low as 2.5V/μm. The process, due to its simplicity and relatively low growth temperature, is promising for practical application in field emission display.

     

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