搜索

x
中国物理学会期刊

栅耦合型静电泄放保护结构设计

CSTR: 32037.14.aps.56.7242

Design of a gate-coupled electrostatic discharge protection structure

CSTR: 32037.14.aps.56.7242
PDF
导出引用
  • 提出了一种新型栅耦合型静电泄放(ESD)保护器件——压焊块电容栅耦合型保护管.该结构不仅解决了原有栅耦合型结构对特定ESD冲击不能及时响应的问题,而且节省了版图面积,提高了ESD失效电压.0.5 μm标准互补型金属氧化物半导体工艺流片测试结果表明,该结构人体模型ESD失效电压超过8 kV.给出了栅耦合型ESD保护结构中ESD检测结构的设计方法,能够精确计算检测结构中电容和电阻的取值.

     

    A novel gate-coupled electrostatic discharge (ESD) protection structure, called bonding-pad capacitance gate-coupled device, is designed. The new structure solves the problem of the traditional gcMOS device not being able to give correct transient response to some specific ESD events. The device layout area is also reduced. The measured results show that the novel structure has a 26%—41% layout area reduction and a high ESD robustnesss greater than 8 kV in a standard 0.5 μm single poly triple metal complementary metal-oxide-semiconductor process.

     

    目录

    /

    返回文章
    返回