SrTiO3 and SrNb0.2Ti0.8O3 thin films were prepared by pulsed laser deposition technique on LaAlO3 (100) single crystal substrates. X-ray diffraction shows that all the thin films have［001］ orientation. With the oxygen pressure increasing, the lattice parameter c of SrTiO3 thin films decreases, while the lattice parameter c of SrNb0.2Ti0.8O3 thin films decreases and then increases. Meanwhile, the optimal oxygen pressure to prepare (SrTiO3/SrNb0.2Ti0.8O3)L multilayer of two-dimensional electron gas was found to be 1.0×10-2Pa. In addition, laser-induced thermoelectric voltage effect was observed on SrNb0.2Ti0.8O3 thin film prepared on vicinal-cut LaAlO3 (100) substrate for the first time.