搜索

x
中国物理学会期刊

AlGaN/GaN槽栅HEMT模拟与实验研究

CSTR: 32037.14.aps.58.1966

Simulation and experimental investigation of recessed-gate AlGaN/GaN HEMT

CSTR: 32037.14.aps.58.1966
PDF
导出引用
  • 分析了栅槽深度对AlGaN/GaN HEMT特性的影响,并对不同栅槽深度的器件特性进行了模拟,得到了器件饱和电流、最大跨导和阈值电压随栅槽深度的变化规律.当槽栅深度增大,器件饱和电流逐渐下降,而最大跨导逐渐增大,阈值电压向X轴正方向移动.研制出不同栅槽深度的蓝宝石衬底AlGaN/GaN HEMT,用实验数据验证了得到的不同栅槽深度器件特性变化规律.从刻蚀损伤和刻蚀引入界面态的角度分析了模拟与实验规律产生差别的原因.

     

    The effect of recessed-gate depth on device characteristics was analyzed. The device characteristics with different recessed-gate depth were simulated by using SILVACO and the variation of saturation current, maximum conductance and threshold with different recessed-gate depth were obtained. With increasing recessed-gate depth, the saturation current reduces and maximum conductance increases and the threshold shifts to positive direction of X-axis. High electron mobility transistors of AlGaN/GaN heterostructure grown on sapphire substrates with different recessed-gate depth were fabricated. The simulation of different recessed-gate depth device characteristics were validated by comparing experiments with the simulation results. The discrepancies between simulation and experiment were analyzed in the aspects of etching damage and interface states.

     

    目录

    /

    返回文章
    返回