In-doped ZnO nanoarrays were successfully synthesized by the carbon thermal reduction deposition process, at 850℃ using Au catalyst. The length of legs of T-ZnO nanorods is 2—3 μm and the diameter is ～400 nm, dimensionally uniform and the surface smooth. Energy dispersive spectroscopy and X-ray photoelectron spectroscopy investigations show that the In content of nanorods reaches about 08%. Room temperature photoluminescence spectra of the nanoarrays shows that the ultraviolet emission peak red-shifts and becomes broader after doping. Raman scattering study shows that ZnO peaks have different shift, and a new peak appears, which proved a part of In atoms replacing Zn in the crystal lattice.