Rare earth doped yttrium oxide （RE3+:Y2O3） nano powder was fabricated by wet chemical method. The influence of doping concentration and different doping elements on the microstructure, phase composition and spectral properties was analyzed. It was shown that by changing the doping element and doping concentration, the spectral properties, including spectral coefficients and upconversion spectrum, can be controlled, and the material can be made to have better absorption properties for 106 μm laser light.