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中国物理学会期刊

等离子体增强脉冲激光沉积o-BN薄膜

CSTR: 32037.14.aps.58.6530

Deposition of orthorhombic boron nitride films by plasma-enhanced pulsed laser deposition

CSTR: 32037.14.aps.58.6530
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  • 利用等离子体增强脉冲激光沉积系统在Si(100)基底上沉积出了高质量的o-BN薄膜,利用红外光谱(FTIR)、X射线衍射谱(XRD)和原子力显微镜照片对o-BN薄膜进行了表征.通过红外光谱(FTIR)得到o-BN薄膜的红外峰特征峰值为1189cm-1,1585cm-1和1450cm-1;由XRD谱得到o-BN薄膜的(111),(020),(021),(310)和(243)各晶面的衍射峰, 特别是(310)和(243)晶面的衍射峰非常强;通过原子力显微镜照片清楚看到BN薄膜具有尖状突起的表面形貌.

     

    In this paper, high quality orthorhombic boron nitride (o-BN) films were prepared on Si(100) substrate by plasma-enhanced pulsed laser deposition (PE-PLD) for the first time. The films were characterized by Fourier transform infrared (FTIR) spectroscopy,glancing-angle X-ray diffraction (XRD) and atomic force microscopic (AFM). In the FTIR spectrum of the film, we can see three characteristic peaks around 1189cm-1, 1585cm-1 and 1450cm-1 of o-BN. The diffraction peaks [111], [020], [021], [310] and [243] all appeared in XRD, especially [243] and [310] crystal plane diffraction were very strong. The surface morphology was closely observed by AFM photograph.

     

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