搜索

x
中国物理学会期刊

蓝宝石基片上制备大面积Tl2Ba2CaCu2O8超导薄膜

CSTR: 32037.14.aps.59.5035

Fabrication and properties of large area Tl2Ba2CaCu2O8 superconducting thin film on sapphire substrate

CSTR: 32037.14.aps.59.5035
PDF
导出引用
  • 在2英寸双面蓝宝石基片上采用CeO2作为缓冲层制备了高质量Tl2Ba2CaCu2O8(Tl-2212)超导薄膜.以金属铈作为溅射靶材,采用射频磁控反应溅射法生长了c轴织构的CeO2缓冲薄膜,并研究了不同生长条件对于CeO2缓冲层的晶体结构及表面形貌的影响.超导薄膜采用直流磁控溅射和后热处理的方法制备.扫描电子显微镜(SEM)图像显示,超

     

    High quality large area Tl2Ba2CaCu2O8(Tl-2212)superconducting thin films were fabricated on CeO2 buffered two-side sapphire substrates. Using metallic cerium target as the sputtering source, CeO2 buffer film with c-axis orientation was deposited by radio frequency reactive magnetron sputtering, and the influence of preparation conditions on the structure and surface morphology of the CeO2 layer was studied. The Tl-2212 superconducting thin film was fabricated on CeO2 buffered sapphire substrate by direct current magnetron sputtering and post annealing. Scanning electron microscope showed that the film has a compact microstructure with uniform flat surface. The X-ray diffraction indicated that the film was pure Tl-2212 phase with c-axis perpendicular to the substrate surface, and epitaxially grown on the CeO2 buffered sapphire. The superconducting film exhibited excellent uniform electric properties. The critical transition temperature Tc was around 105 K, the critical current density Jc(77 K, 0 T) was around (1.2±0.1) MA/cm2 and (1.25±0.1) MA/cm2, respectively, and the microwave surface resistance Rs (77 K, 10 GHz ) of the film was as low as 390 μΩ.

     

    目录

    /

    返回文章
    返回