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中国物理学会期刊

应变Si电子电导有效质量模型

CSTR: 32037.14.aps.59.6545

Model of electronical conductivity effective mass of strained Si

CSTR: 32037.14.aps.59.6545
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  • 采用K·P微扰法建立了应变Si导带能谷由纵、横向有效质量表征的E-k关系,并在此基础上,研究分析了(001),(101),(111)晶面应变Si电子的电导有效质量与应力、能谷分裂能及晶向的关系.结果表明,弛豫Si1-xGex材料(001)面生长的应变Si沿100,010晶向的电子电导有效质量和弛豫Si1-xGex材料(101)面生长的应变Si

     

    Strained Si CMOS technology is one of the most advanced technologies in present day microelectronics. Electronical conductivity effective mass of strained Si is a key parameter to study electron mobility enhancement. Using K ·P method with the help of perturbation theory, dispersion relation near conduction band valley was determined, including the longitudinal and transverse masses. And then, electronical conductivity effective masses of strained Si on (001),(101) and (111) planes were obtained with respect to stress, splitting energy and directions. It was found that both the 100and 010directional electronical conductivity effective masses of strained Si/(001)Si1-xGex and the 010directional one of strained Si/(101)Si1-xGex decrease with increasing Ge fraction or stress, and both values tend to be constant. The results provide valuable reference to the conduction channel design related to stress and orientation in the strained Si nMOS devices.

     

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