The two-dimensional scattering patterns for micro-structural changes during creep observed by SAXS are different from that obtained by SANS technique. The changes in morphology and size characteristics of different regions of the secondary γ' precipitates have been demonstrated by the variation of SAXS scattering intensity. The results show that the secondary γ' precipitates have two types of feature sizes, which have similar trends of change during the creep process characterized by decreasing in the first and second stage and increasing in the final stage. As comparison shows, the larger γ' precipitates have more noticeable changes. The elements of the secondary γ' precipitates diffuse seriously in the second stage with the character of creep 15 h, the surfaces of γ' phase are blurred, and interfaces of two-phase become clear again in the final stage. Due to the increasing size or the reducing number of the secondary γ' phase, the total ares of interfaces between the secondary γ' precipitates and matrix phase then decreases.