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中国物理学会期刊

a-SiNx/nc-Si/a-SiNx双势垒结构中的电荷隧穿和存储效应

CSTR: 32037.14.aps.60.027301

Tunnelling and storage of charges in a-SiNx/nc-Si/a-SiNx structures

CSTR: 32037.14.aps.60.027301
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  • 在等离子体增强化学气相沉积系统中利用大氢稀释逐层淀积技术制备nc-Si量子点阵列,用硅烷和氨气混合气体淀积氮化硅层,制备了a-SiNx/nc-Si/a-SiNx不对称双势垒结构,其中隧穿和控制a-SiNx层的厚度分别为3和20 nm.利用电导-电压和电容-电压测量研究结构中的载流子隧穿和存储特性.在同一样品中观测到由于电荷隧穿引起的电导峰和由于电荷存储引起的电容回滞现象.研究结果表明,合理地选择隧穿层和控制栅层的厚度,就能够实现载流子发生共振隧穿进入到nc-Si量子点中,并被保存在nc-Si量子点中.

     

    The a-SiNx/nc-Si/a-SiNx sandwiched structures are fabricated in a plasma enhanced chemical vapour deposition (PECVD) system on n-type Si substrate. The nc-Si layer in thickness of 5 nm is fabricated from hydrogen diluted silane gas by layer-by-layer deposition technique. The thicknesses of tunnel and control SiNx layer are 3 nm and 20 nm, respectively. Conductance-voltage and capacitance-voltage measurements are used to study the charges tunnelling and storage in the sandsiched structures. Distinct frequency-dependent conductance peaks due to charges tunneling into the nc-Si dots and capacitance-voltage hysteresis characteristic due to charges storage in the nc-Si dots are observed in the same sample. The experimental results demonstrate that by controlling the thickness of tunnel and control SiNx layers charges can be loaded onto nc-Si dots via tunnelling and be stored in a-SiNx/nc-Si/a-SiNx structures.

     

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