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中国物理学会期刊

太阳电池用Cu2ZnSnS4薄膜的反应溅射原位生长及表征

CSTR: 32037.14.aps.60.028802

In situ growth and characterization of Cu2ZnSnS4 thin films by reactive magnetron co-sputtering for solar cells

CSTR: 32037.14.aps.60.028802
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  • 通过直流反应磁控溅射技术,原位生长制备了太阳电池用Cu2ZnSnS4(CZTS)薄膜.采用X射线能量色散谱仪、扫描电镜、X射线衍射仪、紫外可见分光光度计和霍尔效应测试系统对薄膜进行了表征.结果表明,原位生长的CZTS薄膜具有均质、致密和平整的形貌,且由贯穿整个薄膜厚度的柱状颗粒组成.不同基底温度下生长所得薄膜的Cu/(Zn+Sn) 值均约为1,而Zn/Sn值均大于1且随着基底温度升高而减小.所得薄膜在(112)方向上择优取向明显,且结构特征受基底温度和Cu/(Zn+Sn)的共同影响.所得薄膜均具有高达104cm-1的光吸收系数,其带隙宽度随着生长温度的增加而降低,并且在500℃时为(1.51±0.01)eV.薄膜的导电类型均为p型,且具有与器件级Cu(In,Ga)Se2(CIGS)相当的载流子浓度.

     

    Cu2ZnSnS4 (CZTS) thin films have been first in situ grown by reactive magnetron co-sputtering and its characterizations has been carried out by energy dispersive spectroscopy(EDS), X-ray diffraction(XRD), scan electron microscope(SEM), optical transmittance and electronic measurement. It was observed that the grown film shows homogeneous, compact surface morphology, and consists of large columnar grains throughout the thickness. The atom ratio Cu/(Zn+Sn) is about 1, while Zn/Sn is larger than 1 and decreases with the increase of substrate temperature. XRD analysis indicates that the grown film exhibits strong preferential orientation along (112) plane and the structural properties depend on growth temperature and Cu/(Zn+Sn) ratio. The in situ grown CZTS film has an optical absorption coefficient higher than 104 cm-1, and the optical band gap becomes narrow with the increase of substrate temperature and achieves (1.51±0.01)eV at 500℃. The conduction type of the CZTS films is p-type and the value of carrier concentration is comparable with values of device quality CIGS.

     

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