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采用脉冲激光沉积技术,在Si(111)衬底上成功制备出不同含量Na,Co共掺的ZnO薄膜.利用X射线衍射仪、原子力显微镜、荧光光谱仪以及四探针电阻率测试台对薄膜的结构、表面形貌和光电性质进行了表征.重点讨论了不同掺杂浓度对薄膜光电性质的影响.结果表明:Na,Co共掺没有改变ZnO的六角纤锌矿结构且掺杂导致薄膜仅有的的紫外发光峰出现红移.当Na,Co掺杂浓度分别为10%时,峰值最强且红移最明显,发光峰波长为397 nm,薄膜的电阻率最低,达到了8.34×10-1 Ω ·cm.深入讨论了
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关键词:
- 脉冲激光沉积 /
- Zn1-x-yNaxCoyO薄膜 /
- 光电性质 /
- 红移
Zn1-x-yNaxCoyO thin films were prepared by pulsed laser deposition (PLD) on Si(111) substrates. The X-ray diffraction(XRD), atomic force microscopy(AFM), fluorescence spectrometer and the Four-probe tester were used respectively to investigate the structure, surface structure, optical and electrical properties of the thin films. The optical and electrical properties of Zn1-x-yNaxCoyO doped with different Na-Co concentrations are investigated. The result indicates that the structure of films are zincite and the doping of Na-Co leads to the red-shift of the UV emission peak of ZnO. When the doping concentration of both Na and Go are 10%, the film has the highest fluoresence intensity located at 397 nm, and the lowest resistivity of 8.34×10-1 Ω ·cm is detected in this film. The reasons of above-mentioned phenomena are discussed in depth.-
Keywords:
- pulsed laser deposition /
- Zn1-x-yNaxCoyO thin films /
- optical and electrical properties /
- red-shift







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