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中国物理学会期刊

辉光放电聚合物结构及力学性质研究

CSTR: 32037.14.aps.60.086803

Structure and mechanical property of glow discharge polymer

CSTR: 32037.14.aps.60.086803
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  • 采用低压等离子体聚合技术,通过调整工作气压和反式二丁烯(T2B)与H2流量比制备了辉光放电聚合物(GDP)涂层. 利用傅里叶变换红外吸收光谱和元素分析法讨论了工作气压和T2B与H2流量比对GDP涂层内部H原子含量及结构的影响,并且通过纳米压痕技术对GDP涂层的硬度及杨氏模量进行了表征.研究结果表明:降低工作气压和T2B与H2流量比,GDP涂层内sp3 C

     

    Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H2 by using low-pressure plasma enhanced chemical vapor deposition technology. Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum. The hardness and modulus of GDP coating are measured by nanoindentation. It is found that when working pressure and flux ratio between T2B and H2 gradually decrease, hydrogen content and sp3 CH3 groups decrease, sp2 CH2 and sp3 CH1,2 groups increase and hardness H and Youngs modulus E of GDP coating and the cross-linking degree of carbon network inerease.

     

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