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阈值退化是器件特性退化最重要的表征.本文以研究SOI SONOS EEPROM器件的前栅和背栅阈值电压在辐照环境下的漂移为入手点,深入研究了在辐照情况下器件的退化;并从物理能带和载流子漂移的角度,分析了导致阈值电压漂移的物理机理,提出了提高器件性能的措施.
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关键词:
- SONOS EEPROM /
- SOI /
- 辐照 /
- 能带
Threshold voltage drift is one of the most important characteristics of device degradation. Based on the research of threshold drifts of the front and the back gate of SOI SONOS EEPROM, device degradation is studied in irradiation environment. Physical mechanism of threshold drifts is analyzed through physical band and mobile carrier analysis. And measures to improve device performance are proposed.-
Keywords:
- SONOS EEPROM /
- SOI /
- radiation /
- physical bands
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中国物理学会期刊
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