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本文在研究IMOS器件结构的基础上, 分析了该器件不同区域的表面电场, 结合雪崩击穿条件, 建立了P-IMOS的阈值电压解析模型. 应用MATLAB对该器件阈值电压模型与源漏电压、栅长和硅层厚度的关系进行了数值分析, 并用二维器件仿真工具ISE进行了验证. 结果表明, 源电压越大, 阈值电压值越小; 栅长所占比例越大, 阈值电压值越小, 硅层厚度越小, 阈值电压值越小. 本文提出的模型与ISE仿真结果一致, 也与文献报道符合. 这种新型高速半导体器件IMOS阈值电压解析模型的建立为该高性能器件及对应电路的设计、仿真和制造提供了重要的参考.A threshold voltage model is created by analyzing differents distributions of surface electric field and the condition of avalanche breakdown, based on the structure of a novel high speed semiconductor device p-IMOS in this paper. Model verification is carried out using the 2D device simulator ISE. By analyzing the model, the dependences of threshold voltage on drain-source voltage, Si layer thickness and gate length are studied. The results of the model are in good agreement with experimental results and ISE simulation results. The proposed model can also be easily used for the reasonable analysis and the design of p-IMOS.
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Keywords:
- IMOS /
- subthreshold swing /
- avalanche breakdown /
- threshold voltage







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