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中国物理学会期刊

带有n+深阱的三阱CMOS工艺中寄生NPN双极效应及其对电荷共享的影响

CSTR: 32037.14.aps.61.096102

NPN bipolar effect and its influence on charge sharing in a tripe well CMOS technology with n+ deep well

CSTR: 32037.14.aps.61.096102
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  • 基于三维TCAD器件模拟, 研究了带有n+深阱的90 nm三阱CMOS器件在重离子辐照下产生的电荷共享效应. 研究结果表明在重离子辐照时, n+深阱会导致寄生的NPN双极型晶体管触发, 显著增强NMOS间的电荷共享, 其放大因子达到双阱工艺中寄生PNP晶体管放大因子的24倍. 进而分别研究了n阱接触和p阱接触对寄生NPN双极放大的影响, 结果表明增大p阱接触的面积和减小n阱接触的距离将抑制NPN晶体管的放大作用, 而增大n阱接触的面积将增强NPN的放大作用.

     

    In this paper, we investigate the charge sharing collection induced by heavy ion radiation in a tripe well CMOS technology with n+ deep well though 3-D TCAD device simulation. Result shows that n+ deep well will induce the parasitical NPN bipolar transistor, and therefore enhance the charge sharing between NMOS remarkably. The enhancement factor is 24 times that in PNP bipolar in dual well technology. Furthermore, the effects of n-well contact and p-well contact on NPN bipolar are studied. The result shows that the NPN bipolar enhancement factor will decrease with the increase of p-well contact area and with the decreasing of its distance to device, while the NPN bipolar enhancement factor will increase with the increase of n-well contact area.

     

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