In this paper, Cu/W nanomultilayers with different modulation periods are prepared in pure Ar and mixing atmosphere (He and Ar) by radio frequency magnetron sputtering method. The helium content, cross-section morphology and phase structure of Cu/W nanomultilayer are characterized by EPBS, SEM and XRD, repectively. The results show that the stable interface of the nanomultilayer is the prerequisite for resisting and the guarantee against the damage of helium. The nanomultilayer can suppress the growth of helium bubbles under the appropriate modulation.