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采用辉光放电技术和等离子体质谱诊断技术, 研究了H2/C4H8混合气体等离子体中正离子成分及主要正离子能量随射频功率的变化规律, 并分析了H2/C4H8混合气体主要的离解机理和形成过程. 研究表明: 随着射频功率的增加, 碳氢碎片离子的浓度增加, 在20 W时达到最大值, 25 W后有所减小. 当射频功率小于10 W时, H2/C4H8混合气体等离子体中C4H9+相对浓度最大, 当功率大于或等于10 W时, C3H3+相对浓度最大. 随着射频功率的增大, 碳氢碎片离子的能量逐渐增加. 对H2/C4H8混合气体等离子体的组成与能量进行的定性分析, 将为H2/C4H8混合气体辉光放电聚合物涂层工艺参数优化提供参考.Taking advantage of the glowing discharge technology and plasma mass spectrometry diagnosis technology, the variation rules of positive ion species and energy with power in H2/C4H8 mixture gas are investigated. The characteristic ions are measured and their forming process is discussed. The results show that the intensity of the C-H segment ions in the H2/C4H8 plasma increases with radio-frequency (RF) power increasing, the intensity reaches a maximum at an RF power of 20 W, and then reduces after the RF power has reached 25 W. The relative concentration of m/e 57 (C4H9+) is highest when the power is less than 10 W, and when the power is more than 10 W, the relative concentration of m/e 39 (C3H3+) reaches a maximum. The energy of the C-H segment ions increases gradually with the increase of RF power. The qualitative analyses of H2/C4H8 plasma composition and energy will be beneficial to improving the fabrication technology of glowing discharge polymer coating.







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