Two kinds of films are deposited on 316L stainless steel substrates by radio frequency reactive magnetron sputtering technique. One is fluorinated diamond-like carbon film (F-DLC) deposited on the 316L stainless steel substrate directly and the other is F-DLC with SiC intermediate layer. This paper focuses on the changing regulation of film adhesion with preparation condition. As the result, the adhesion of fluorinated diamond-like carbon film with SiC intermediate layer is obviously much better than that of F-DLC, and the adhesion is dependent on preparation condition of preparation SiC intermediate layer. The adhesion of F-DLC can reach 8.7 N with 200 W RF input power and 5 min deposition time, which is much bigger than the adhesion of F-DLC without intermediate layer (4 N). The mechanism of the preparation condition of SiC influencing the adhesive force of F-DLC is studied by investigating the deposition rate curve, surface morphology and infrared spectrum.