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中国物理学会期刊

氧对IZO低压无结薄膜晶体管稳定性的影响

CSTR: 32037.14.aps.62.137201

Effect of oxygen on stability performance of the IZO junctionless thin film transistors

CSTR: 32037.14.aps.62.137201
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  • 本文在室温下制备了无结结构的低压氧化铟锌薄膜晶体管, 并研究了氧分压对其稳定性的影响. 氧化铟锌无结薄膜晶体管具有迁移率高、结构新颖等优点, 然而氧化物沟道层易受氧、水分子等影响, 造成稳定性下降. 在室温下, 本文通过改变高纯氧流量制备氧化铟锌透明导电薄膜作为沟道层、源漏电极, 分析了氧压对于氧化物无结薄膜晶体管稳定性的影响. 为使晶体管在低电压(6、亚阈值斜率小于100 mV/decade以及场效 应迁移率大于20 cm2/V·s. 实验研究表明, 通氧制备的氧化铟锌薄膜的电阻率会上升, 导致晶体管的阈值电压向正向漂移, 最终使晶体管的工作模式由耗尽型转变为增强型.

     

    We report in this paper that low-voltage indium-zinc oxide (IZO) junctionless thin-film transistors (TFT) can be fabricated at room temperature, and the device stability performance influenced by oxygen pressure is studied. IZO junctionless TFT has a high mobility and novel structure, but the oxide channel layers are vulnerable due to the influence of oxygen and water molecules, which will lead to the degradation of the device stability. In this study, we fabricate transparent and conductive IZO thin-films at room temperature as channel layers, and source/drain electrodes by controlling the oxygen flow, and also analyze the effect of oxygen on the stability of oxide junctionless TFT. In order to operate at low-voltage (2 nanoparticle films as gate dielectric, which have electron double layers (EDL) effect and large gate capacitance, and the TFTs show excellent electrical performance with small operating voltage of 1 V, large on/off ratio(>106), small subthreshold swing(20 cm2/V·s). The study indicates that the resistivity of IZO thin-film fabricated in increasing oxygen content, leads the threshold voltage to drift in a positive direction, and makes operating mode of TFT change from depletion mode to enhanced mode.

     

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