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中国物理学会期刊

SnO2/p+-Si异质结器件的电致发光:利用TiO2盖层提高发光强度

CSTR: 32037.14.aps.63.177302

Electroluminescence from SnO2/p+-Si heterostructured light-emitting device:enhancing its intensity via capping a TiO2 film

CSTR: 32037.14.aps.63.177302
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  • 通过在重掺硼硅(p+-Si)衬底上溅射SnO2薄膜并在O2气氛下800 ℃热处理形成SnO2/p+-Si异质结. 基于该异质结的器件可在低电压(电流)驱动下电致发光. 进一步地,通过在SnO2薄膜上增加TiO2盖层,使器件的电致发光获得显著增强. 这是由于TiO2盖层的引入,一方面使SnO2薄膜更加致密,减少了非辐射复合中心;另一方面TiO2较大的折射率和合适的厚度使SnO2薄膜电致发光的出光效率得到提高.

     

    Low-voltage (current) driven electroluminescence (EL) has been achieved in the light-emitting device (LED) with a SnO2/p+-Si heterostructure, which is formed by sputtering SnO2 film on a p+-Si substrate, followed by annealing at 800 ℃ in O2 ambient. Furthermore, by means of capping a TiO2 film onto the SnO2 film, the modified LED exhibits significantly enhanced EL. The densification of SnO2 film as a result of the TiO2-capping is responsible for reducing the non-radiative centers. Moreover, the large refractive index and appropriate thickness of TiO2-capped layer are favorable for the extraction of emitted light from SnO2 film. Such two effects of TiO2-capping contribute to the aforementioned enhanced EL.

     

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