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中国物理学会期刊

应变(001)p型金属氧化物半导体反型层空穴量子化与电导率有效质量

CSTR: 32037.14.aps.63.238501

Hole quantization and conductivity effective mass of the inversion layer in (001) strained p-channel metal-oxid-semiconductor

CSTR: 32037.14.aps.63.238501
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  • 基于kp微扰理论框架, 研究建立了单轴张/压应变Si, Si基双轴应变p型金属氧化物半导体(PMOS)反型层空穴量子化有效质量与空穴面内电导率有效质量模型. 结果表明: 对于单轴应力PMOS, 选择单轴压应力可有效增强器件的性能; 同等增强PMOS空穴迁移率, 需要施加的单轴力强度小于双轴力的强度; 在选择双轴应力增强器件性能时, 应优先选择应变Si1-xGex作为沟道材料. 所获得的量化理论结论可为Si基及其他应变器件的物理理解及设计提供重要理论参考.

     

    Within the framework of k p perturbation theory, models of the hole quantization and conductivity effective mass for the inversion layer in uniaxially tensile/compressive and Si-based baixially strained p-channel metal-oxid-semiconductor (PMOS) have been established. Results show that: 1) uniaxially compressive technique should be chosen for the carrier mobility enhancement in uniaxially strained PMOS; 2) the magnitude of uniaxial stress will be less than that of the biaxial case to improve PMOS performance using strained technique; 3) strained Si1-xGex is preferred to use instead of using strained Si, when we choose the biaxially strained materials for the PMOS channel. Our results can provide valuable references to Si-based and other strained device and materials design.

     

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