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基于kp微扰理论框架, 研究建立了单轴张/压应变Si, Si基双轴应变p型金属氧化物半导体(PMOS)反型层空穴量子化有效质量与空穴面内电导率有效质量模型. 结果表明: 对于单轴应力PMOS, 选择单轴压应力可有效增强器件的性能; 同等增强PMOS空穴迁移率, 需要施加的单轴力强度小于双轴力的强度; 在选择双轴应力增强器件性能时, 应优先选择应变Si1-xGex作为沟道材料. 所获得的量化理论结论可为Si基及其他应变器件的物理理解及设计提供重要理论参考.
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关键词:
- 应变 /
- p型金属氧化物半导体 /
- 沟道 /
- 设计
Within the framework of k p perturbation theory, models of the hole quantization and conductivity effective mass for the inversion layer in uniaxially tensile/compressive and Si-based baixially strained p-channel metal-oxid-semiconductor (PMOS) have been established. Results show that: 1) uniaxially compressive technique should be chosen for the carrier mobility enhancement in uniaxially strained PMOS; 2) the magnitude of uniaxial stress will be less than that of the biaxial case to improve PMOS performance using strained technique; 3) strained Si1-xGex is preferred to use instead of using strained Si, when we choose the biaxially strained materials for the PMOS channel. Our results can provide valuable references to Si-based and other strained device and materials design.-
Keywords:
- strain /
- p-channel metal-oxid-semiconductor /
- channel /
- design







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