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中国物理学会期刊

AlGaN/GaN高电子迁移率晶体管温度传感器特性

CSTR: 32037.14.aps.69.20190640

Characteristics of AlGaN/GaN high electron mobility transistor temperature sensor

CSTR: 32037.14.aps.69.20190640
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  • 本文制作了基于无栅AlGaN/GaN 高电子迁移率晶体管结构的温度传感器, 并对其温度相关的电学特性进行了表征. 实验测试了器件从50 ℃到400 ℃的变温电流-电压特性, 研究了器件灵敏度随着器件沟道长宽比的变化, 并研究了在300—500 ℃高温的空气和氮气中经过1 h恒温加热后器件的电学特性变化. 理论与实验研究结果表明, 随着器件沟道长宽比的增大, 器件的灵敏度会随之上升; 在固定电流0.01 A下, 器件电压随温度变化的平均灵敏度为44.5 mV/℃. 同时, 稳定性实验显示器件具有较好的高温保持稳定性.

     

    Semiconductor temperature sensors have been widely used in medical, industrial, aviation and civil fields due to their advantages such as high sensitivity, small size, low power consumption and strong anti-interference ability. However, most Si-based temperature sensors are not suitable for the application in high-temperature environments. The new AlGaN/GaN heterojunction material not only has a wide band gap, but also has a high two-dimensional electron gas concentration and carrier mobility. Therefore, the device made with it not only has good electrical properties, but also can be applied in ultra-high environments. In this paper, a temperature sensor based on gateless AlGaN/GaN high electron mobility transistor structure was fabricated and its temperature-dependent electrical properties were characterized. The temperature dependence of current-voltage characteristics of the device were tested from 50 to 400 °C. The sensitivity of the device was studied as a function of the channel aspect ratio of the device. The stability of electrical properties was characterized after heating in air and nitrogen at 300—500 °C for 1 hour. The theoretical and experimental results show that as the aspect ratio of the device increases, the sensitivity of the device increases. At a fixed current of 0.01 A, the average sensitivity of the device voltage with temperature changes is 44.5 mV/°C. Meanwhile, the good high temperature retention stability is shown during stability experiments.

     

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