-
分别采用Stark展宽法、图像法诊断等离子体电子密度, 研究常压针-板放电等离子体电子密度随放电参数的演化. 实验结果表明, 降低电源的脉冲频率, 减小等离子体的电极间距和采用细径电极, 都有助于提高等离子体密度. 利用全局模型分析影响电子密度变化的因素可知, 随着脉冲频率的下降, 等离子体放电体积减小, 导致电子密度上升. 在电极间距减小的过程中, 电子密度变化则是降低等离子体吸收功率与减小放电体积共同作用的结果, 其中放电体积的减小起到了更为主导的作用, 导致电子密度上升. 此外, 采用细径电极也可以使等离子体放电体积减小, 从而有利于获得较高的电子密度.Based on the Stark broadening method and the imaging method, the electron densities of the plasma generated at different pulse frequencies, gap distances and inner diameters of the electrodes are diagnosed. The experimental results indicate that reducing the pulse frequency, shortening the gap distance between the electrodes, and using thinner diameter electrode are all in favor of enhancing the electron density. With the help of the global model, we perform the numerical simulation to explore the factors that influence the variation of the electron density. According to the simulations results, we find that the reduced discharge volume results in the increase of electron density with the increase of pulse frequency. When the gap distance between the electrodes is reduced, although the increased absorbed power and the reduced discharge volume both have an effect on the electron density, the reduced discharge volume plays a decisive role in these two factors. Moreover, using a thinner inner diameter electrode can also reduce the discharge volume, which is of benefit to obtaining the plasma with high electron density.
-
Keywords:
- atmospheric pressure plasma /
- pin-to-plate discharge /
- electron density /
- discharge volume








下载: