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中国物理学会期刊

氮化镓基高电子迁移率晶体管单粒子和总剂量效应的实验研究

CSTR: 32037.14.aps.70.20202028

Single event effect and total dose effect of GaN high electron mobility transistor using heavy ions and gamma rays

CSTR: 32037.14.aps.70.20202028
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  • 利用重离子加速器和60Co γ射线实验装置, 开展了p型栅和共栅共源级联结构增强型氮化镓基高电子迁移率晶体管的单粒子效应和总剂量效应实验研究, 给出了氮化镓器件单粒子效应安全工作区域、总剂量效应敏感参数以及辐射响应规律. 实验发现, p型栅结构氮化镓器件具有较好的抗单粒子和总剂量辐射能力, 其单粒子烧毁阈值大于37 MeV·cm2/mg, 抗总剂量效应水平高于1 Mrad (Si), 而共栅共源级联结构氮化镓器件则对单粒子和总剂量辐照均很敏感, 在线性能量传输值为22 MeV·cm2/mg的重离子和累积总剂量为200 krad (Si)辐照时, 器件的性能和功能出现异常. 利用金相显微镜成像技术和聚焦离子束扫描技术分析氮化镓器件内部电路结构, 揭示了共栅共源级联结构氮化镓器件发生单粒子烧毁现象和对总剂量效应敏感的原因. 结果表明, 单粒子效应诱发内部耗尽型氮化镓器件的栅肖特基势垒发生电子隧穿可能是共栅共源级联结构氮化镓器件发生源漏大电流的内在机制. 同时发现, 金属氧化物半导体场效应晶体管是导致共栅共源级联结构氮化镓器件对总剂量效应敏感的可能原因.

     

    The single event effect (SEE) and the total ionizing dose (TID) effect of a commercial enhancement mode gallium nitride (GaN) high electron nobility transistor (HEMT) with p-type gate structure and cascode structure are studied by using the radiation of heavy ions and 60Co gamma in this paper. The safe operating areas ofSEE, the sensitive parameters degradation of TID effect and the SEE and TID characteristics of GaN HEMT device are respectively presented. The experimental results show that the SEE and TID effect have less influence on the p-type gate GaN device. The linear energy transfer (LET) threshold of the single event Burnout effect (SEB) is higher than 37 MeV·cm2/mg and the failure threshold of TID effect is above 1M rad (Si) for p-type gate GaN device. However, the GaN HEMT device with cascode structure is much more sensitive to SEE and TID effect than p-type gate GaN device. Under heavy ions at LET of 22 MeV·cm2/mg and a cumulative dose of 200 krad (Si), the SEB phenomenon and parameters-degradation of cascode-type GaN HEMT are respectively observed. Besides, the circuit structure of the cascode-type GaN HEMT device is analyzed by using metallographic microscope imaging and focused ions beam technology. It reveals the possible reason why it is sensitive to SEB and TID for cascode-type GaN HEMT. These results show that the extra carriers caused by heavy ion radiation can tunnel the Schottky barrier formed by gate metal and AlGaN layer, leading to a large source-drain current in GaN HEMT device. Meanwhile, it is shown that the metal oxide semiconductor field-effect transistor in cascode circuit for TP90H180PS GaN HEMT may be the main reason why the cascode-type GaN HEMT is sensitive to TID.

     

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