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中国物理学会期刊

基于云母衬底生长的非晶Ga2O3柔性透明日盲紫外光探测器研究

CSTR: 32037.14.aps.70.20211039

Flexible transparent solar blind ultraviolet photodetector based on amorphous Ga2O3 grown on mica substrate

CSTR: 32037.14.aps.70.20211039
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  • 基于宽禁带半导体材料氧化镓(Ga2O3)制备日盲深紫外(UV)光电探测器是当前研究的热点课题之一, 但如何制备出高性能的Ga2O3基日盲探测器应用于柔性透明光电子领域仍然存在挑战. 本文采用射频磁控溅射技术在柔性云母衬底上生长了具有高透射率的非晶Ga2O3薄膜. 在此基础之上, 采用铝掺杂氧化锌(AZO)作为电极材料, 制备了非晶Ga2O3薄膜基金属-半导体-金属(MSM)结构的透明日盲深紫外光电探测器, 并系统对比分析了平面状态和多次弯曲后的器件性能. 结果表明, 非晶Ga2O3基透明探测器具有超高的可见光透明度, 并显示出良好的日盲紫外光电特性. 器件在254 nm光照下的响应率为2.69 A/W, 响应和恢复时间为0.14 s/0.31 s. 经过300次机械弯曲后, 器件具有与其平面状态相近的光响应行为, 器件性能没有发生明显的衰减现象, 表现出良好的柔韧性和稳定性. 本工作证实了AZO薄膜可作为下一代柔性和可见光透明的Ga2O3基探测器的电极材料, 并为研制高性能柔性透明日盲深紫外探测器提供一定参考.

     

    Solar-blind deep-ultraviolet (UV) photodetectors (PDs) based on the super-wide bandgap semiconductor material Ga2O3 is one of the hot topics of current research, but how to prepare high-performance Ga2O3-based solar-blind PDs in the field of flexible and transparent optoelectronics still faces challenges. In this work, an amorphous Ga2O3 film with high transmittance is grown on a flexible mica substrate by using the radio frequency magnetron sputtering technology. On this basis, using AZO as an electrode material, a transparent metal-semiconductor-metal (MSM) structured solar-blind deep ultraviolet photodetector based amorphous Ga2O3 film is fabricated, and the performance of PD in the planar state and after multiple bending are systematically compared and analyzed. The results show that the amorphous Ga2O3 based transparent PD has ultra-high visible light transparency and shows good solar-blind ultraviolet photoelectric characteristics. The responsivity of the PD under 254 nm light is 2.69 A/W, and the response time and the recovery time are 0.14 s and 0.31 s, respectively. After bending 300 times, the PD has a photoresponse behavior similar to its planar state, and the performance of the PD has no obvious attenuation phenomenon, showing good flexibility and stability. This work proves that AZO can be used as the electrode material of the next generation of flexible and visible light transparent Ga2O3 based photodetectors, and provides a reference for developing the high-performance flexible and transparent solar-blind deep ultraviolet photodetectors.

     

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