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中国物理学会期刊

双腔比对折射率法测定气体压力

CSTR: 32037.14.aps.71.20212234

Measurement of gas pressure by double-cavity comparison refractive index method

CSTR: 32037.14.aps.71.20212234
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  • 搭建了基于气体折射率方法的气体压力测量装置, 测量区间为10—100 kPa, 采用双腔比对方法对装置进行了检验. 通过将两个真空腔体分别控温, 并且真空连通, 保证了两个腔内气体压力相同. 以高纯氮气(6N)为气体介质, 在不同气体压力条件下, 得到了双腔对比测量的初步结果. 结果显示, 基于光学方法的气体折射率压力计重复度高于30 × 10–6, 显著好于商用电容式薄膜压力计, 说明该方法具有很大潜力. 本文还分析了测量中的误差来源, 并计划通过改进系统设计以提高测量精度.

     

    A gas pressure measurement device is built based on the gas refractive index method, and the measurement range is from 10 kPa to 100 kPa, and the device is tested by a dual-cavity comparison method. The temperature of the two vacuum chambers is separately controlled and the two cavities are connected to ensure that the gas pressures in the two cavities are the same. Using high-purity nitrogen (6N) as the gas medium, under the condition of different gas pressures, the dual-cavity comparative measurements are conducted. The results show that the optical pressure gauge has a repeatability better than 30 × 10–6, which is significantly better than the commercial capacitive pressure gauge, indicating that this method has great potential applications. Sources of error and uncertainty in the measurement are analyzed, and it is planned to design a new system to improve the measurement.

     

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