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中国物理学会期刊

具有大光电导增益的氧化镓薄膜基深紫外探测器阵列

CSTR: 32037.14.aps.71.20220859

Gallium oxide thin film-based deep ultraviolet photodetector array with large photoconductive gain

CSTR: 32037.14.aps.71.20220859
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  • 氧化镓在深紫外探测方面具有天然的材料优势, 鉴于探测器阵列在光学成像等领域有着十分重要的用途, 本文主要介绍了一个五叉指电极结构的4×4氧化镓基深紫外探测器阵列. 氧化镓薄膜由金属有机化学气相沉积技术生长得到, 器件的加工通过紫外光刻、剥离和离子束溅射技术完成. 由此得到的氧化镓薄膜结晶度高且表面均匀. 探测器具有优异的深紫外光响应特性, 光响应度可达2.65×103 A/W, 探测度达2.76×1016 Jones, 同时还具有(1.29×106)%的外量子效率, 光电导增益高达12900; 16个探测器单元的暗电流和光电流均具有良好的均匀性. 本文从光电性能和应用前景的角度说明了氧化镓深紫外探测器阵列的巨大应用潜力.

     

    Gallium oxide (Ga2O3) has the natural advantages in deep ultraviolet absorbance for performing deep ultraviolet photodetection. Owing to the vital application of photodetector array in optical imaging, in this work, we introduce a 4×4 Ga2O3-based photodetector array with five-finger interdigital electrodes, in which the high-quality and uniform Ga2O3 thin film is grown by using metal-organic chemical vapor deposition technique, and the device is fabricated by using the following methods: ultraviolet photolithography, lift-off, and ion beam sputtering . The photodetector cell possesses a responsivity of 2.65×103 A/W, a detectivity of 2.76×1016 Jones, an external quantum efficiency of (1.29×106)%, and a photoconductive gain as high as 12900. The 16-cells in this array show good uniformity. In this work the great application potential of gallium oxide deep ultraviolet detector array is illustrated from the perspective of optoelectronic performance and application prospect.

     

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