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中国物理学会期刊

高功率密度多结级联905 nm垂直腔面发射激光器

CSTR: 32037.14.aps.71.20220888

Multi-junction cascade 905 nm vertical cavity surface emitting lasers with high power density

CSTR: 32037.14.aps.71.20220888
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  • 本文针对激光雷达等三维传感应用, 设计并制备了905 nm波长的高功率密度5结级联垂直腔面发射激光器(vertical cavity surface emitting laser, VCSEL). 制备的5结级联VCSEL单管(氧化孔径8 μm)的功率转换效率高达55.2%; 其最大斜率效率为5.4 W/A, 约为相同孔径单结VCSEL的5倍. 窄脉冲条件下(脉冲宽度为5.4 ns, 占空比0.019%), 5结级联19单元VCSEL阵列(单元孔径20 μm)的峰值输出功率达到58.3 W, 对应的峰值功率密度高达1.62 kW/mm2. 对不同孔径器件(8—20 μm)的光电特性进行了测试和分析. 结果显示, 这些器件的最大斜率效率均大于5.4 W/A, 最大功率转换效率均大于54%. 这些高性能VCSEL器件可作为激光雷达等三维传感应用的理想光源.

     

    Aiming at three-dimensional (3D) sensing applications such as LiDAR, high power density five-junction cascaded vertical cavity surface emitting lasers (VCSELs) with 905 nm wavelength are designed and fabricated. The maximum power conversion efficiency is 55.2% for an individual VCSEL emitter with 8 μm oxide aperture. And the maximum slope efficiency of the device is 5.4 W/A, which is approximately 5 times that of traditional single-junction VCSEL with the same aperture. Under the condition of narrow pulse (pulse width 5.4 ns, duty cycle 0.019%) injection, the peak output power of 19-element array (20 μm oxidation aperture for each element) reaches 58.3 W, and the corresponding power density is as high as 1.62 kW/mm2. The devices with various apertures (8–20 μm) are characterized. The results show that the maximum slope efficiencies of all these devices are greater than 5.4 W/A and the maximum PCE is higher than 54%. These high-performance VCSEL devices can be used as ideal light sources for 3D sensing applications such as LiDAR.

     

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