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中国物理学会期刊

面向复杂求解域的高效粒子网格/蒙特卡罗模型与阳极层离子源仿真

CSTR: 32037.14.aps.72.20222394

High-efficient particle-in-cell/Monte Carlo model for complex solution domain andsimulation of anode layer ion source

CSTR: 32037.14.aps.72.20222394
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  • 等离子体仿真是研究等离子体放电特性的重要手段, 特别是阳极层离子源, 其放电结构的几何特性对等离子体特性的作用很难通过实验手段进行系统研究. 然而, 传统仿真模型一般是针对离子源进行整体建模, 离子源的阴阳极几何轮廓形成的复杂求解域, 导致模型的计算效率和收敛性较差. 鉴于此, 将离子源结构仿真与等离子体仿真分离, 首先利用磁镜原理将离子源内外阴极大小、形状和相对位置等一系列阴极几何参数简化为磁镜比Rm和磁镜中心磁感应强度 B 0两个磁镜参数, 并在此基础上, 建立了高效粒子网格/蒙特卡罗模型, 将收敛时间由1.00 μs缩短到0.45 μs, 大幅提升了计算效率和稳定性. 进一步利用该模型系统研究了阳极层离子源放电结构的几何特性对等离子体特性的影响规律, 发现Rm = 2.50, B 0 = 36 mT时磁镜对等离子体约束效果最佳, 当放电中心的位置与内外阴极间磁镜中心重合时, 不仅能够输出高密度离子束流, 同时可大幅减少阴极刻蚀, 并保证内外阴极的刻蚀平衡.

     

    Plasma simulation is important in studying the plasma discharge systematically, especially the anode layer ion source which has the complex geometrical characteristics of the discharge structure. However, owing to the complex solution domain formed by the geometric profile of the anode and cathode, the traditional simulation models show extremely small computational efficiency and poor convergence. This work presents a separate simulation for the ion source structure and the plasma discharge, separately, where the cathode geometric parameters (including the size, the shape and the relative position of the inner and outer cathodes) are simplified into two magnetic mirror parameters (the magnetic mirror ratio Rm and the magnetic induction intensity in the center of the magnetic mirror B 0), and then a high-efficient particle-in-cell/Monte Carlo collision (PIC/MCC) model is established to improve the computational efficiency and stability of the plasma simulation later. As a result, the convergence time of the plasma simulation is shortened significantly from 1.00 μs to 0.45 μs, and by which the influences of the geometrical characteristics of the discharge structure on the plasma properties are systematically studied. The simulation results reveal that magnetic mirror with Rm = 2.50 and B 0 = 36 mT can best confine the plasma in the central area between the inner cathode and outer cathode. When the discharge center of the plasmacoincides with the magnetic mirror center, the anode layer ion source presents both high density output of ion beam current and significantly reduced cathode etching, suggesting that the best balance is obtained between the output and cathode etching.

     

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