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金属液滴是真空弧放电的伴随产物, 它对理解阴极斑放电性质具有重要作用, 而且对工程应用也有重要影响. 金属液滴的测量一般采用离线的收集法, 不能获得全部空间和单次放电信息. 本文提出了一种通过Mie散射在线测量真空弧放电液滴的新方法, 并对它的可行性进行了探索研究. 首先通过仿真程序计算了钛金属液滴的散射光性质, 结果表明小直径颗粒散射光在全部角度上均有分布, 随着直径增加, 散射光越来越集中在前向, 这为不同直径液滴信号的反演提供了可能. 接着对探测器进行了分环设计, 当探测器分为35环时, 光能系数矩阵容易求解, 同时保证测量系统具有良好的分辨率. 初步实验结果表明, 钛金属液滴直径主要分布在9.8 μm附近, 验证了Mie散射测量真空弧液滴方法的有效性. 但液滴直径分布和离线测量有较大差异, 缺少小直径液滴信息, 主要原因来源于测量系统信噪比不够, 不能有效地获得小直径液滴散射信号, 还需要进一步优化.Metal droplet is produced accompanied with vacuum arc discharge, which is important to the research of cathode spot and the application of vacuum arc. The droplet comes from the cathode spot crater and can reflect the physical process of the cathode spot. However, it will destroy the uniformity of surface deposition in engineering and should be avoided as much as possible. The measurement of metal droplet usually adopts off-line collector, which cannot obtain the signal of the whole space and singe arc. In order to on-line measure the droplet, a new method by the Mie scattering is developed in this work, and its feasibility is investigated. The characteristic of the scattering light of titanium droplet is computed by the simulation code. The results indicate that the scattering light beams of the small droplet are distributed at all angles. With the increase of the diameter, the scattered light beams are more and more concentrated in the forward direction, which allows the inversion of the signals of the droplets with different diameters. Then the detector is designed with different annuluses. When the detector is divided into 35 annuluses, the light energy coefficient matrix is easy to solve and the measurement system has a good resolution. The experimental setup is built and the preliminary experiment is carried out. The results indicate that the diameters of titanium droplets are mainly around 9.8 μm, which verifies the effectiveness of the Mie scattering method of measuring vacuum arc droplets. However, the small droplet information is not detected, so the droplet diameter distribution is quite different from the off-line measurement. The reason is that the signal-to-noise ratio of the measurement system is poor, thereby leading the scattered signals of the small droplet to fail to be obtained effectively. The experimental setup need to be further optimized.
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Keywords:
- Mie scattering /
- vacuum arc /
- droplet /
- detector








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