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中国物理学会期刊

非晶态碳薄膜对金属二次电子发射的影响

CSTR: 32037.14.aps.73.20231604

Effect of amorphous carbon film on secondary electron emission of metal

CSTR: 32037.14.aps.73.20231604
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  • 非晶态碳薄膜由于具有极低的二次电子发射系数(secondary electron yield, SEY), 在真空微波器件与设备异常放电领域引起了广泛关注. 然而, 非晶态碳薄膜对二次电子发射影响的动态过程及微观机理仍缺乏了解. 本文采用Monte Carlo方法, 建立了Cu表面非晶态碳薄膜的二次电子发射数值模拟模型, 能够精确地模拟电子与薄膜及基底材料的散射及二次电子发射的微观物理过程. 结果表明, 随着薄膜厚度从0 nm增加至1.5 nm时, SEY峰值下降了大约20%; 继续增大厚度, SEY峰值不再下降. 然而, 当薄膜厚度大于0.9 nm时, SEY曲线呈现出双峰形态, 但随着薄膜厚度增加至3 nm, 第二峰逐渐减弱甚至消失. 电子散射轨迹和二次电子能量分布结果, 表明这种双峰现象是由于电子在两种材料中散射所致. 相比以往模型, 所提模型考虑了功函数的变化以及界面势垒对电子散射路径的影响. 该模型从微观层面上解释了SEY曲线双峰现象形成的原因, 相关的计算结果为非晶态碳薄膜对SEY的抑制规律提供了理论预测.

     

    Amorphous carbon films have attracted much attention in the field of abnormal discharge of vacuum microwave devices and equipment due to their extremely low secondary electron yields (SEYs). However, the dynamic process and microscopic mechanism of the effect of amorphous carbon film on secondary electron emission are still poorly understood. In this work, a numerical simulation model of the secondary electron emission of amorphous carbon film on copper surface is developed by the Monte Carlo method, which can accurately simulate the dynamic processes of electron scattering and emission of the film and the substrate. The results show that the maximum SEY decreases by about 20% when the film thickness increases from 0 to 1.5 nm. Further increasing the thickness, the SEY no longer decreases. However, when the film is thicker than 0.9 nm, the SEY curve exhibits a double-hump form, but with the thickness increasing to 3 nm, the second peak gradually weakens or even disappears. The electron scattering trajectories and energy distribution of secondary electrons indicate that this double-hump phenomenon is caused by electron scattering in two different materials. Compared with previous models, the proposed model takes into account the change of work function and the effect of interfacial barrier on electron scattering path. Our model can explain the formation of the double-hump of SEY curve and provides theoretical predictions for suppressing the SEY by amorphous carbon film.

     

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