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中国物理学会期刊

隧道磁阻传感器性能优化研究进展

CSTR: 32037.14.aps.75.20251597

Research progress of performance optimization of tunnel magnetoresistive sensors

CSTR: 32037.14.aps.75.20251597
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  • 隧道磁阻(tunneling magnetoresistance, TMR)传感器作为新一代高性能磁传感技术的代表, 凭借其高灵敏度、低功耗、宽频响及优异的集成性, 在工业自动化、新能源汽车、生物医疗和智能电网等领域展现出广泛应用前景. 本文系统地综述了TMR磁传感器的性能优化策略, 重点从薄膜材料体系与敏感结构设计两个维度展开分析. 在材料体系方面, 详细地探讨了高灵敏TMR材料体系和宽量程TMR材料体系的发展现状与优化思路; 在结构设计方面, 系统地阐述了磁性隧道结几何形状优化、磁轭结构设计、磁通聚集器集成及噪声调制技术等创新方案. 本文还总结了TMR传感器在生物医疗和智能电网等前沿领域的应用进展, 并对未来发展方向进行展望: 开发更高灵敏度与更宽量程的TMR材料体系、实现一体化高性能三轴TMR磁传感、探索TMR与人工智能的深度融合等. 本文为TMR磁传感器的性能突破与应用拓展提供了系统性参考, 对推动其在高精度磁场探测领域的深入应用具有重要指导意义.

     

    Tunnel magnetoresistance (TMR) sensors have emerged as a leading technology in high-performance magnetic sensing due to their high sensitivity, low power consumption, and miniaturization. In order to meet the everchanging demands of cutting-edge applications such as biomagnetic imaging and smart grid monitoring, continuous performance enhancement is crucial. This paper systematically reviews the key strategies for optimizing TMR sensors, focusing on thin-film material engineering and sensitive microstructure design. Material advancements are dissected along two paths: developing high-sensitivity systems via MgO barriers and composite free layers, and creating wide-linear-range systems through anisotropy engineering, including both perpendicular (PMA) and in-plane (IMA) configurations, as well as dynamic methods such as electric-field and strain modulation. Structurally, we highlight innovations such as vortex-state magnetic tunnel junctions (MTJs) and magnetic flux concentrators to enhance linearity and sensitivity, as well as advanced noise modulation techniques that effectively suppress low-frequency 1/f noise. The practical effect of these optimizations is reflected in the fact that TMR sensors can now measure magnetocardiograms (MCG) outside shielded environments and provide high-accuracy current sensing in smart grids. The future development is directed toward novel material systems that pursue either enhanced sensitivity or an extented linear range, the realization of monolithic three-axis vector sensors, and the deep integration of TMR technology with artificial intelligence for smart sensing systems. This work provides a comprehensive reference for advancing TMR sensor technology and its applications in high-precision magnetic field detection.

     

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